Focused particle beam-induced processing

• Michael Huth and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2015, 6, 1883–1885, doi:10.3762/bjnano.6.191

• dissociation channels at play in FEBID are reviewed in the article by Rachel Thormann and coworkers [1]. FEBID-specific continuum modeling approaches are elucidated in a review article by Milos Toth and collaborators [2]. An aspect thus far not considered in electron beam-induced growth is the role of surface

• excitations, as pointed out in the article by Francesc Salvat-Pujol et al. [3]. Recently, in an effort towards obtaining pure metal nanostructures, the postprocessing of FEBID structures has become an active field of research. This is covered in this Thematic Series by Brett Lewis and coworkers with a focus

Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

• Francesc Salvat-Pujol,
• Roser Valentí and
• Wolfgang S. Werner

Beilstein J. Nanotechnol. 2015, 6, 1260–1267, doi:10.3762/bjnano.6.129

• /bjnano.6.129 Abstract The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible

• present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations. Keywords: focused-electron-beam-induced deposition (FEBID); Monte Carlo simulation

• of electron transport; surface excitations; secondary-electron emission; Introduction An accurate modelling of the energy losses of electrons traversing a solid surface is instrumental for a quantitative understanding of a series of techniques exploiting transmitted, reflected, or emitted electrons

Nano-structuring, surface and bulk modification with a focused helium ion beam

• Daniel Fox,
• Yanhui Chen,
• Colm C. Faulkner and
• Hongzhou Zhang

Beilstein J. Nanotechnol. 2012, 3, 579–585, doi:10.3762/bjnano.3.67

• material on a TEM lamella with minimum thickness dimensions of just a few tens of nanometers. This thickness may even be less than our thickness map indicates as significant errors may be present in the mapping process for very thin samples due to surface excitations, which can lead to overestimation of